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2005 | ||
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1 | EE | Takashi Nasuno, Yoshihisa Matsubara, Hiromasa Kobayashi, Akiyuki Minami, Eiichi Soda, Hiroshi Tsuda, Koichiro Tsujita, Wataru Wakamiya, Nobuyoshi Kobayashi: Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing OPC Using Inner and Outer via Chain Dummy Patterns. IEICE Transactions 88-C(5): 796-803 (2005) |
1 | Hiromasa Kobayashi | [1] |
2 | Yoshihisa Matsubara | [1] |
3 | Akiyuki Minami | [1] |
4 | Takashi Nasuno | [1] |
5 | Eiichi Soda | [1] |
6 | Hiroshi Tsuda | [1] |
7 | Koichiro Tsujita | [1] |
8 | Wataru Wakamiya | [1] |