| |
| 2005 | ||
|---|---|---|
| 1 | EE | Takashi Nasuno, Yoshihisa Matsubara, Hiromasa Kobayashi, Akiyuki Minami, Eiichi Soda, Hiroshi Tsuda, Koichiro Tsujita, Wataru Wakamiya, Nobuyoshi Kobayashi: Novel via Chain Structure for Failure Analysis at 65 nm-Node Fixing OPC Using Inner and Outer via Chain Dummy Patterns. IEICE Transactions 88-C(5): 796-803 (2005) |
| 1 | Hiromasa Kobayashi | [1] |
| 2 | Yoshihisa Matsubara | [1] |
| 3 | Akiyuki Minami | [1] |
| 4 | Takashi Nasuno | [1] |
| 5 | Eiichi Soda | [1] |
| 6 | Hiroshi Tsuda | [1] |
| 7 | Koichiro Tsujita | [1] |
| 8 | Wataru Wakamiya | [1] |