Henry I. Smith

List of publications from the DBLP Bibliography Server - FAQ

1993

1 Henry I. Smith, Mark L. Schattenburg: X-ray lithography from 500 to 30 nm: X-ray nanolithography. IBM Journal of Research and Development 37(3): 319-330 (1993)

1993
1		Henry I. Smith, Mark L. Schattenburg: X-ray lithography from 500 to 30 nm: X-ray nanolithography. IBM Journal of Research and Development 37(3): 319-330 (1993)

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