| |
| 1992 | ||
|---|---|---|
| 1 | Tung-Sheng Kuan, Philip E. Batson, Randall M. Feenstra, Alan J. Slavin, Ruud M. Tromp: Application of electron and ion beam analysis techniques to microelectronics. IBM Journal of Research and Development 36(2): 183-207 (1992) | |
| 1 | Philip E. Batson | [1] |
| 2 | Randall M. Feenstra | [1] |
| 3 | Tung-Sheng Kuan | [1] |
| 4 | Ruud M. Tromp | [1] |