| |
| 2008 | ||
|---|---|---|
| 3 | EE | Sugato Bagchi, Ching-Hua Chen-Ritzo, Sameer T. Shikalgar, Michael Toner: A full-factory simulator as a daily decision-support tool for 300MM wafer fabrication productivity. Winter Simulation Conference 2008: 2021-2029 |
| 2003 | ||
| 2 | EE | Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair: Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation. Winter Simulation Conference 2003: 1394-1375 |
| 2002 | ||
| 1 | EE | Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair: Wafer fabrication: 300mm wafer fabrication line simulation model. Winter Simulation Conference 2002: 1365-1368 |
| 1 | Sugato Bagchi | [3] |
| 2 | Ching-Hua Chen-Ritzo | [3] |
| 3 | David Fronckowiak | [1] [2] |
| 4 | Edward A. MacNair | [1] [2] |
| 5 | Michael Toner | [3] |