|  |  | 
| 2003 | ||
|---|---|---|
| 3 | EE | Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair: Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation. Winter Simulation Conference 2003: 1394-1375 | 
| 2 | EE | Nirmal Govind, David Fronckowiak: Process equipment modeling: resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing. Winter Simulation Conference 2003: 1398-1405 | 
| 2002 | ||
| 1 | EE | Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair: Wafer fabrication: 300mm wafer fabrication line simulation model. Winter Simulation Conference 2002: 1365-1368 | 
| 1 | Nirmal Govind | [2] | 
| 2 | Edward A. MacNair | [1] [3] | 
| 3 | Sameer T. Shikalgar | [1] [3] |