2003 | ||
---|---|---|
3 | EE | Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair: Process equipment modeling: application of cluster tool modeling to a 300 mm fab simulation. Winter Simulation Conference 2003: 1394-1375 |
2 | EE | Nirmal Govind, David Fronckowiak: Process equipment modeling: resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing. Winter Simulation Conference 2003: 1398-1405 |
2002 | ||
1 | EE | Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair: Wafer fabrication: 300mm wafer fabrication line simulation model. Winter Simulation Conference 2002: 1365-1368 |
1 | Nirmal Govind | [2] |
2 | Edward A. MacNair | [1] [3] |
3 | Sameer T. Shikalgar | [1] [3] |