| |
| 2001 | ||
|---|---|---|
| 1 | EE | Yasuhiro Mitsui, Fumiko Yano, Hiroshi Kakibayashi, Hiroyasu Shichi, Takashi Aoyama: Developments of new concept analytical instruments for failure analyses of sub-100 nm devices. Microelectronics Reliability 41(8): 1171-1183 (2001) |
| 1 | Takashi Aoyama | [1] |
| 2 | Hiroshi Kakibayashi | [1] |
| 3 | Yasuhiro Mitsui | [1] |
| 4 | Fumiko Yano | [1] |