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1990 | ||
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1 | EE | Kenji Taniguchi, Yoshiaki Shibata, Chihiro Hamaguchi: Process modeling and simulation: boundary conditions for point defect-based impurity diffusion model. IEEE Trans. on CAD of Integrated Circuits and Systems 9(11): 1177-1183 (1990) |
1 | Chihiro Hamaguchi | [1] |
2 | Kenji Taniguchi | [1] |