| |
| 2005 | ||
|---|---|---|
| 1 | EE | M. Alper Sahiner, Daniel F. Downey, Steven W. Novak, Joseph C. Woicik, Dario A. Arena: The local structural characterization of the inactive clusters in B, BF2 and BF3 implanted Si wafers using X-ray techniques. Microelectronics Journal 36(3-6): 522-526 (2005) |
| 1 | Dario A. Arena | [1] |
| 2 | Daniel F. Downey | [1] |
| 3 | Steven W. Novak | [1] |
| 4 | Joseph C. Woicik | [1] |