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Steven W. Novak

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2005
1EEM. Alper Sahiner, Daniel F. Downey, Steven W. Novak, Joseph C. Woicik, Dario A. Arena: The local structural characterization of the inactive clusters in B, BF2 and BF3 implanted Si wafers using X-ray techniques. Microelectronics Journal 36(3-6): 522-526 (2005)

Coauthor Index

1Dario A. Arena [1]
2Daniel F. Downey [1]
3M. Alper Sahiner [1]
4Joseph C. Woicik [1]

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