John F. Rembetski

List of publications from the DBLP Bibliography Server - FAQ

1992

1 Gottlieb S. Oehrlein, John F. Rembetski: Plasma-based dry etching techniques in the silicon integrated circuit technology. IBM Journal of Research and Development 36(2): 140-157 (1992)

1992
1		Gottlieb S. Oehrlein, John F. Rembetski: Plasma-based dry etching techniques in the silicon integrated circuit technology. IBM Journal of Research and Development 36(2): 140-157 (1992)

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