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2004 | ||
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1 | EE | Sohan Singh Mehta, Sun Hai Qin, Moitreyee Mukherjee-Roy, Navab Singh, Rakesh Kumar: Resist pattern peeling assessment in DUV chemically amplified resist. Microelectronics Journal 35(5): 427-429 (2004) |
1 | Rakesh Kumar | [1] |
2 | Sohan Singh Mehta | [1] |
3 | Moitreyee Mukherjee-Roy | [1] |
4 | Navab Singh | [1] |