2000 | ||
---|---|---|
4 | EE | Mark Pool, Robert Bachrach: Productivity modeling of semiconductor manufacturing equipment. Winter Simulation Conference 2000: 1423-1427 |
1998 | ||
3 | EE | Mark Pool, Richard Stafford: Optimazation and Analysis of Performance in Simulation. Winter Simulation Conference 1998: 1689-1692 |
1994 | ||
2 | EE | Todd LeBaron, Mark Pool: The simulation of cluster tools: a new semiconductor manufacturing technology. Winter Simulation Conference 1994: 907-912 |
1990 | ||
1 | EE | Robert W. Atherton, Linda F. Atherton, Mark Pool: Detailed simulation for semiconductor manufacturing. Winter Simulation Conference 1990: 659-663 |
1 | Linda F. Atherton | [1] |
2 | Robert W. Atherton | [1] |
3 | Robert Bachrach | [4] |
4 | Todd LeBaron | [2] |
5 | Richard Stafford | [3] |