G. Y. Park

2007
1	EE	Y. J. Hong, H. S. Ko, G. Y. Park, J. K. Lee: Kinetic plasma simulations for three dielectric etchers. Computer Physics Communications 177(1-2): 122-123 (2007)

Coauthor Index

1	Y. J. Hong	[1]
2	H. S. Ko	[1]
3	J. K. Lee	[1]