H. S. Ko
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2007
1
EE
Y. J. Hong
, H. S. Ko,
G. Y. Park
,
J. K. Lee
: Kinetic plasma simulations for three dielectric etchers.
Computer Physics Communications 177
(1-2): 122-123 (2007)
Coauthor
Index
1
Y. J. Hong
[
1
]
2
J. K. Lee
[
1
]
3
G. Y. Park
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
