| |
| 2008 | ||
|---|---|---|
| 3 | EE | Jianliang You, Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat: Static and dynamic evaluation of Silicon-On-Insulator-based scanning micromirrors. IJISTA 5(1/2): 185-200 (2008) |
| 2 | EE | Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat: Bulk micromachining for SOI based microsystems using double side XeF2 etching. IJMTM 13(2/3/4): 297-307 (2008) |
| 2006 | ||
| 1 | EE | Arvind Chandrasekaran, Muthukumaran Packirisamy, Ion Stiharu, Andre Delage: Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices. IJMTM 9(1/2): 144-159 (2006) |
| 1 | Avinash K. Bhaskar | [2] [3] |
| 2 | Rama B. Bhat | [2] [3] |
| 3 | Arvind Chandrasekaran | [1] |
| 4 | Andre Delage | [1] |
| 5 | Ion Stiharu | [1] |
| 6 | Jianliang You | [3] |