| |
| 2006 | ||
|---|---|---|
| 1 | EE | Arvind Chandrasekaran, Muthukumaran Packirisamy, Ion Stiharu, Andre Delage: Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices. IJMTM 9(1/2): 144-159 (2006) |
| 1 | Arvind Chandrasekaran | [1] |
| 2 | Muthukumaran Packirisamy | [1] |
| 3 | Ion Stiharu | [1] |