2006 | ||
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1 | EE | Maciej Wolborski, Mietek Bakowski, Armando Ortiz, Viljami Pore, Adolf Schöner, Mikko Ritala, Markku Leskelä, Anders Hallén: Characterisation of the Al2O3 films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H-SiC devices. Microelectronics Reliability 46(5-6): 743-755 (2006) |
1 | Mietek Bakowski | [1] |
2 | Anders Hallén | [1] |
3 | Markku Leskelä | [1] |
4 | Viljami Pore | [1] |
5 | Mikko Ritala | [1] |
6 | Adolf Schöner | [1] |
7 | Maciej Wolborski | [1] |