| |
| 2007 | ||
|---|---|---|
| 1 | EE | Yanli Pei, Hideki Murakami, Seiichiro Higashi, Seiichi Miyazaki, Seiji Inumiya, Yasuo Nara: Evaluation of Dielectric Reliability of Ultrathin HfSiOxNy in Metal-Gate Capacitors. IEICE Transactions 90-C(5): 962-967 (2007) |
| 1 | Seiichiro Higashi | [1] |
| 2 | Seiji Inumiya | [1] |
| 3 | Seiichi Miyazaki | [1] |
| 4 | Hideki Murakami | [1] |
| 5 | Yanli Pei | [1] |