Peter H. Mitchell
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1997
1
EE
Steven J. Holmes
, Peter H. Mitchell,
Mark C. Hakey
: Manufacturing with DUV lithography.
IBM Journal of Research and Development 41
(1&2): 7-20 (1997)
Coauthor
Index
1
Mark C. Hakey
[
1
]
2
Steven J. Holmes
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
