2007 |
4 | EE | M. Guerino,
M. Massi,
Ronaldo Domingues Mansano:
The influence of nitrogen and fluorine on the dielectric constant of hydrogenated amorphous carbon (a-C: H) films.
Microelectronics Journal 38(8-9): 915-918 (2007) |
2003 |
3 | EE | A. P. Mousinho,
Ronaldo Domingues Mansano,
M. Massi,
L. S. Zambom:
High density plasma chemical vapor deposition of diamond-like carbon films.
Microelectronics Journal 34(5-8): 627-629 (2003) |
2 | EE | M. Massi,
J. M. J. Ocampo,
H. S. Maciel,
K. Grigorov,
C. Otani,
L. V. Santos,
Ronaldo Domingues Mansano:
Plasma etching of DLC films for microfluidic channels.
Microelectronics Journal 34(5-8): 635-638 (2003) |
1 | EE | M. Guerino,
M. Massi,
H. S. Maciel,
C. Otani,
Ronaldo Domingues Mansano:
The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films.
Microelectronics Journal 34(5-8): 639-641 (2003) |