Fuyuan Luo
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2008
1
EE
Fuyuan Luo,
Juan Yin
: An optimal scheduling algorithm for the motion control of step and scan lithography.
ICARCV 2008
: 1702-1707
Coauthor
Index
1
Juan Yin
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1
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Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
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