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Sandrine Lucas

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1999
1EESandrine Lucas, N. Outaleb, Olivier Bonnaud, J. Pine: Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology. MSE 1999: 28-29

Coauthor Index

1Olivier Bonnaud [1]
2N. Outaleb [1]
3J. Pine [1]

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