Sandrine Lucas

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1999

1 EE Sandrine Lucas, N. Outaleb, Olivier Bonnaud, J. Pine: Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology. MSE 1999: 28-29

1999
1	EE	Sandrine Lucas, N. Outaleb, Olivier Bonnaud, J. Pine: Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology. MSE 1999: 28-29

Coauthor Index

1 Olivier Bonnaud [1]

2 N. Outaleb [1]

3 J. Pine [1]