Sandrine Lucas
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1999
1
EE
Sandrine Lucas,
N. Outaleb
,
Olivier Bonnaud
,
J. Pine
: Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology.
MSE 1999
: 28-29
Coauthor
Index
1
Olivier Bonnaud
[
1
]
2
N. Outaleb
[
1
]
3
J. Pine
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)