Yong-Hui Lee
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2003
1
Jae-Young Yi
, Yong-Hui Lee,
Cheon-Hee Yi
: PEDE (Plasma Edge Damage Effect) Curing by Various Heat Treatment.
VLSI 2003
: 356-360
Coauthor
Index
1
Cheon-Hee Yi
[
1
]
2
Jae-Young Yi
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
