| |
| 2008 | ||
|---|---|---|
| 1 | EE | Jan Lange, Kilian Schmidt, Roy Borner, Oliver Rose: Automated generation and parameterization of throughput models for semiconductor tools. Winter Simulation Conference 2008: 2335-2340 |
| 1 | Roy Borner | [1] |
| 2 | Oliver Rose | [1] |
| 3 | Kilian Schmidt | [1] |