Roy Borner
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2008
1
EE
Jan Lange
,
Kilian Schmidt
, Roy Borner,
Oliver Rose
: Automated generation and parameterization of throughput models for semiconductor tools.
Winter Simulation Conference 2008
: 2335-2340
Coauthor
Index
1
Jan Lange
[
1
]
2
Oliver Rose
[
1
]
3
Kilian Schmidt
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)