| 2006 |
|---|
| 4 | EE | S. Kal,
S. Das,
D. K. Maurya,
K. Biswas,
A. Ravi Sankar,
S. K. Lahiri:
CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity.
Microelectronics Journal 37(1): 22-30 (2006) |
| 3 | EE | K. Biswas,
S. Das,
D. K. Maurya,
S. Kal,
S. K. Lahiri:
Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface.
Microelectronics Journal 37(4): 321-327 (2006) |
| 2 | EE | K. Biswas,
S. Kal:
Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon.
Microelectronics Journal 37(6): 519-525 (2006) |
| 1 | EE | K. Biswas,
S. Das,
S. Kal:
Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures.
Microelectronics Journal 37(8): 765-769 (2006) |
