2003 | ||
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1 | EE | Stephen C. Jakeway, H. John Crabtree, Teodor Veres, Neil S. Cameron, Helge Luesebrink, Thomas Glinsner: Transition of MEMS Technology to Nanofabrication. ICMENS 2003: 118-122 |
1 | Neil S. Cameron | [1] |
2 | H. John Crabtree | [1] |
3 | Thomas Glinsner | [1] |
4 | Helge Luesebrink | [1] |
5 | Teodor Veres | [1] |