| |
| 2003 | ||
|---|---|---|
| 1 | EE | Stephen C. Jakeway, H. John Crabtree, Teodor Veres, Neil S. Cameron, Helge Luesebrink, Thomas Glinsner: Transition of MEMS Technology to Nanofabrication. ICMENS 2003: 118-122 |
| 1 | H. John Crabtree | [1] |
| 2 | Thomas Glinsner | [1] |
| 3 | Stephen C. Jakeway | [1] |
| 4 | Helge Luesebrink | [1] |
| 5 | Teodor Veres | [1] |