| |
| 1985 | ||
|---|---|---|
| 1 | EE | Peter Pichler, Werner Jüngling, Siegfried Selberherr, Edgar Guerrero, Hans W. Pötzl: Simulation of Critical IC-Fabrication Steps. IEEE Trans. on CAD of Integrated Circuits and Systems 4(4): 384-397 (1985) |
| 1 | Edgar Guerrero | [1] |
| 2 | Peter Pichler | [1] |
| 3 | Hans W. Pötzl | [1] |
| 4 | Siegfried Selberherr | [1] |