2005 | ||
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1 | EE | Takashi Kawanoue, Seiichi Omoto, Masahiko Hasunuma, Takashi Yoda: Investigation of Cu ion drift through CVD TiSiN into SiO2 under bias temperature stress conditions. IEICE Electronic Express 2(7): 254-259 (2005) |
1 | Takashi Kawanoue | [1] |
2 | Seiichi Omoto | [1] |
3 | Takashi Yoda | [1] |