| |
| 2008 | ||
|---|---|---|
| 1 | EE | Nicolas Abelé, D. Grogg, C. Hibert, F. Casset, Pascal Ancey, Adrian M. Ionescu: 0-level Vacuum Packaging RT Process for MEMS Resonators CoRR abs/0802.3093: (2008) |
| 1 | Nicolas Abelé | [1] |
| 2 | Pascal Ancey | [1] |
| 3 | F. Casset | [1] |
| 4 | C. Hibert | [1] |
| 5 | Adrian M. Ionescu | [1] |