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2008 | ||
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1 | EE | M. Puech, Jean-Marc Thevenoud, J. M. Gruffat, N. Launay, N. Arnal, P. Godinat: Fabrication of 3D Packaging TSV using DRIE CoRR abs/0805.0919: (2008) |
1 | N. Arnal | [1] |
2 | J. M. Gruffat | [1] |
3 | N. Launay | [1] |
4 | M. Puech | [1] |
5 | Jean-Marc Thevenoud | [1] |