| |
| 2008 | ||
|---|---|---|
| 1 | EE | M. Puech, Jean-Marc Thevenoud, J. M. Gruffat, N. Launay, N. Arnal, P. Godinat: Fabrication of 3D Packaging TSV using DRIE CoRR abs/0805.0919: (2008) |
| 1 | P. Godinat | [1] |
| 2 | J. M. Gruffat | [1] |
| 3 | N. Launay | [1] |
| 4 | M. Puech | [1] |
| 5 | Jean-Marc Thevenoud | [1] |