Sherri J. Gillespie
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1984
1
Sherri J. Gillespie: Resist Profile Control in E-Beam Lithography.
IBM Journal of Research and Development 28
(4): 454-460 (1984)
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)