| |
| 2005 | ||
|---|---|---|
| 1 | EE | Shinji Fujieda, Yoshinao Miura, Motofumi Saitoh, Yuden Teraoka, Akitaka Yoshigoe: Characterization of interface defects related to negative-bias temperature instability in ultrathin plasma-nitrided SiON/Si<1 0 0> systems. Microelectronics Reliability 45(1): 57-64 (2005) |
| 1 | Yoshinao Miura | [1] |
| 2 | Motofumi Saitoh | [1] |
| 3 | Yuden Teraoka | [1] |
| 4 | Akitaka Yoshigoe | [1] |