A. Enzler

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2003

1 EE A. Dommann, A. Enzler, N. Onda: Advanced X-ray analysis techniques to investigate aging of micromachined silicon actuators for space application. Microelectronics Reliability 43(7): 1099-1103 (2003)

2003
1	EE	A. Dommann, A. Enzler, N. Onda: Advanced X-ray analysis techniques to investigate aging of micromachined silicon actuators for space application. Microelectronics Reliability 43(7): 1099-1103 (2003)

Coauthor Index

1 A. Dommann [1]

2 N. Onda [1]