1988 | ||
---|---|---|
1 | EE | H. Keith Nishihara, P. A. Crossley: Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions. IEEE Trans. Pattern Anal. Mach. Intell. 10(1): 17-30 (1988) |
1 | H. Keith Nishihara | [1] |