2006 | ||
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1 | EE | Oliver Aubel, Eberhard Bugiel, Dietmar Krüger, Wolfgang Hasse, Martina Hommel: Investigation of the influence of thermal treatment on interconnect-barrier interfaces in copper metallization systems. Microelectronics Reliability 46(5-6): 768-773 (2006) |
1 | Oliver Aubel | [1] |
2 | Wolfgang Hasse | [1] |
3 | Martina Hommel | [1] |
4 | Dietmar Krüger | [1] |