| |
| 2000 | ||
|---|---|---|
| 1 | EE | Chiahung J. Lin, Taho Yang, Jose M. Padillo, Debbie Beres: Interbay Automated Material Handling System stocker design for wafer fabrication facilities. IJMTM 1(2/3): 147-155 (2000) |
| 1 | Chiahung J. Lin | [1] |
| 2 | Jose M. Padillo | [1] |
| 3 | Taho Yang | [1] |