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2003 | ||
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2 | EE | Linke Jian, Bernd Loechel, Heinz-Ulrich Scheunemann, Martin Bednarzik, Yohannes M. Desta, Jost Goettert: Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by Deep and Ultra Deep X-Ray Lithography. ICMENS 2003: 10-14 |
1 | EE | Martin Bednarzik, Heinz-Ulrich Scheunemann, Alexander Barth, Daniel Schondelmaier, Bernd Loechel: First Results in Patterning of Ultra High Aspect Ratio Microstructures by a 4T Wave Length Shifter at BESSY. ICMENS 2003: 177- |
1 | Alexander Barth | [1] |
2 | Yohannes M. Desta | [2] |
3 | Jost Goettert | [2] |
4 | Linke Jian | [2] |
5 | Bernd Loechel | [1] [2] |
6 | Heinz-Ulrich Scheunemann | [1] [2] |
7 | Daniel Schondelmaier | [1] |