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Ashraf-F. Bastawros

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2005
1EEMuthukkumar S. Kadavasal, Abhijit Chandra, Sutee Eamkajornsiri, Ashraf-F. Bastawros: Yield improvement via minimisation of step height non-uniformity in chemical mechanical planarisation (CMP) with pressure and velocity as control variables. IJMTM 7(5/6): 467-489 (2005)

Coauthor Index

1Abhijit Chandra [1]
2Sutee Eamkajornsiri [1]
3Muthukkumar S. Kadavasal [1]

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