2004 | ||
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1 | EE | Y. Zhao, F. Wang, Z. C. Cui, J. Zheng, H. M. Zhang, D. M. Zhang, S. Y. Liu, M. B. Yi: Study of reactive ion etching process to fabricate the PMMA-based polymer waveguide. Microelectronics Journal 35(7): 605-608 (2004) |
1 | Z. C. Cui | [1] |
2 | S. Y. Liu | [1] |
3 | F. Wang | [1] |
4 | M. B. Yi | [1] |
5 | D. M. Zhang | [1] |
6 | Y. Zhao | [1] |
7 | J. Zheng | [1] |