Y. Yoshimura
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2008
1
EE
T. Akashi
, Y. Yoshimura: Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching
CoRR abs/0802.3085
: (2008)
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Index
1
T. Akashi
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Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
