Yung-Kuang Yang

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2006

1 EE Yung-Kuang Yang, Tsun-Ching Chang: Experimental analysis and optimization of a photo resist coating process for photolithography in wafer fabrication. Microelectronics Journal 37(8): 746-751 (2006)

2006
1	EE	Yung-Kuang Yang, Tsun-Ching Chang: Experimental analysis and optimization of a photo resist coating process for photolithography in wafer fabrication. Microelectronics Journal 37(8): 746-751 (2006)

Coauthor Index

1 Tsun-Ching Chang [1]