Dawei Yang
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2007
1
EE
Ying Wang
,
Fei Cao
,
Minghui Ding
, Dawei Yang: Investigation of Zr-N thin films for use as diffusion barrier in Cu metallization.
Microelectronics Journal 38
(8-9): 910-914 (2007)
Coauthor
Index
1
Fei Cao
[
1
]
2
Minghui Ding
[
1
]
3
Ying Wang
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
