Alan C. West
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2005
1
EE
Alan C. West,
Hariklia Deligianni
,
Panayotis C. Andricacos
: Electrochemical planarization of interconnect metallization.
IBM Journal of Research and Development 49
(1): 37-48 (2005)
Coauthor
Index
1
Panayotis C. Andricacos
[
1
]
2
Hariklia Deligianni
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
