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2003 | ||
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1 | Chung-Hsien Kuo, Chao-Hsiung Wang, Kuo-Wei Huang: Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net. IEEE Transactions on Systems, Man, and Cybernetics, Part A 33(5): 641-648 (2003) |
1 | Kuo-Wei Huang | [1] |
2 | Chung-Hsien Kuo | [1] |