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1998 | ||
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1 | EE | Panayotis C. Andricacos, Cyprian Uzoh, John O. Dukovic, Jean Horkans, Hariklia Deligianni: Damascene copper electroplating for chip interconnections. IBM Journal of Research and Development 42(5): 567-574 (1998) |
1 | Panayotis C. Andricacos | [1] |
2 | Hariklia Deligianni | [1] |
3 | John O. Dukovic | [1] |
4 | Jean Horkans | [1] |