2002 | ||
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1 | EE | G. M. Kepler, H. T. Banks, H. T. Tran, S. C. Beeler: Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor. SIAM Journal of Applied Mathematics 62(4): 1251-1280 (2002) |
1 | H. T. Banks | [1] |
2 | S. C. Beeler | [1] |
3 | G. M. Kepler | [1] |