Y. H. Tan
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2006
1
EE
Z. W. Zhong
,
Z. F. Wang
, Y. H. Tan: Chemical mechanical polishing of polymeric materials for MEMS applications.
Microelectronics Journal 37
(4): 295-301 (2006)
Coauthor
Index
1
Z. F. Wang
[
1
]
2
Z. W. Zhong
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
